TY - JOUR A1 - Miyamoto, Ko-ichiro A1 - Hayashi, Kosuke A1 - Sakamoto, Azuma A1 - Werner, Frederik A1 - Wagner, Torsten A1 - Schöning, Michael Josef A1 - Yoshinobu, Tatsuo T1 - A high-Q resonance-mode measurement of EIS capacitive sensor by elimination of series resistance T2 - Sensor and Actuators B: Chemical N2 - An EIS capacitive sensor is a semiconductor-based potentiometric sensor, which is sensitive to the ion concentration or pH value of the solution in contact with the sensing surface. To detect a small change in the ion concentration or pH, a small capacitance change must be detected. Recently, a resonance-mode measurement was proposed, in which an inductor was connected to the EIS capacitive sensor and the resonant frequency was correlated with the pH value. In this study, the Q factor of the resonant circuit was enhanced by canceling the internal resistance of the reference electrode and the internal resistance of the inductor coil with the help of a bypass capacitor and a negative impedance converter, respectively. 1% variation of the signal in the developed system corresponded to a pH change of 3.93 mpH, which was about 1/12 of the conventional method, suggesting a better performance in detection of a small pH change. KW - Negative impedance convertor KW - Resonance-mode measurement KW - Chemical sensor KW - EIS capacitive sensor Y1 - 2017 UR - https://opus.bibliothek.fh-aachen.de/opus4/frontdoor/index/index/docId/8146 SN - 0925-4005 VL - 248 SP - 1006 EP - 1010 PB - Elsevier CY - Amsterdam ER -