@article{BussEckenWinkelsetal.2006, author = {G. Buß and H. Ecken and S. Winkels and Michael Josef Sch{\"o}ning and H. L{\"u}th and J. W. Schultze}, title = {Galvanic modifications of multifunctional silicon-based microelectrode arrays}, journal = {Electrochemical technology applications in electronics : proceedings of the third international symposium / [International Symposium on Electrochemical Technology Applications in Electronics, held during October 20 - 22, 1999, Honolulu, Hawaii]. Electrodeposition Division. Ed.: L. T. Romankiw}, pages = {209 -- 215}, year = {2006}, }