TY  - JOUR
A1  - Prume, Klaus
A1  - Roelofs, Andreas
A1  - Schmitz, Thorsten
A1  - Reichenberg, Bernd
T1  - Compensation of the Parasitic Capacitance of a Scanning Force Microscope Cantilever Used for Measurements on Ferroelectric Capacitors of Submicron Size by Means of Finite Element Simulations / Prume, Klaus ; Roelofs, Andreas ; Schmitz, Thorsten ; Reichenb
T2  - Japanese Journal of Applied Physics. 41 (2002), H. 11B
Y1  - 2002
UR  - https://opus.bibliothek.fh-aachen.de/opus4/frontdoor/index/index/docId/4068
SN  - 0021-4922
SP  - 7198
EP  - 7201
ER  -