TY  - JOUR
A1  - Poghossian, Arshak
A1  - Wagner, Holger
A1  - Schöning, Michael Josef
T1  - Functional testing and characterisation of (bio-)chemical sensors on wafer level
T2  - Procedia Chemistry. 1 (2009), H. 1
Y1  - 2009
UR  - https://opus.bibliothek.fh-aachen.de/opus4/frontdoor/index/index/docId/3986
SN  - 1876-6196
N1  - Proceedings of the Eurosensors XXIII conference ; Eurosensors 23
SP  - 835
EP  - 838
ER  -