TY - JOUR A1 - Vlasov, Y. G. A1 - Mourzina, Y. G. A1 - Legin, A. V. A1 - Ermelenko, Y. E. A1 - Schubert, J. A1 - Schöning, Michael Josef A1 - Lüth, H. T1 - Solid-state thin film sensors based on chalcogenide materials prepared by planar technology and pulsed laser deposition T2 - Russian Journal of Applied Chemistry. 75 (2002), H. 3 Y1 - 2002 UR - https://opus.bibliothek.fh-aachen.de/opus4/frontdoor/index/index/docId/1796 SN - 1070-4272 SP - 351 EP - 356 ER -