TY  - JOUR
A1  - Schöning, Michael Josef
A1  - Kurowski, A.
A1  - Thust, M.
A1  - Kordos, P.
A1  - Schultze, J. W.
A1  - Lüth, H.
T1  - Capacitive microsensors for biochemical sensing on porous silicon technology
T2  - Sensors and Actuators B. 64 (2000), H. 1-3
Y1  - 2000
UR  - https://opus.bibliothek.fh-aachen.de/opus4/frontdoor/index/index/docId/1826
SN  - 0925-4005
SP  - 59
EP  - 64
ER  -