TY - JOUR A1 - Schöning, Michael Josef A1 - Schubert, Joachim P. A1 - Kloock, Joachim P. A1 - Zander, W. A1 - Mourzina, Y. G. A1 - Legin, A. A1 - Vlasov, Y. G. A1 - Lüth, H. T1 - Innovative thin film techniques for microfabricating electrochemical sensors T2 - Biocybernetics and Biomedical Engineering. 21 (2001), H. 4 Y1 - 2001 UR - https://opus.bibliothek.fh-aachen.de/opus4/frontdoor/index/index/docId/360 SN - 0208-5216 SP - 107 EP - 119 ER -