@inproceedings{OberlaenderJildehKirchneretal.2016, author = {Jan Oberl{\"a}nder and Zaid B. Jildeh and Patrick Kirchner and Luisa Wendeler and Alexander Bromm and Heiko Iken and Patrick Wagner and Michael Keusgen and Michael Josef Sch{\"o}ning}, title = {Experimental and numerical evaluation of interdigitated electrode array for monitoring gaseous sterilization processes}, booktitle = {12. Dresdner Sensor-Symposium 2015}, pages = {163 -- 168}, doi = {10.5162/12dss2015/P3.11}, year = {2016}, }