@article{PrumeMuraltCalameetal.2007,
  author    = {Prume, Klaus and Muralt, Paul and Calame, Florian and Schmitz-Kempen, Thorsten},
  title     = {Extensive electromechanical characterization of PZT thin films for MEMS applications by electrical and mechanical excitation signals / Prume, Klaus ; Muralt, Paul ; Calame, Florian ; Schmitz-Kempen, Thorsten ; Tiedke, Stephan},
  series = {Journal of Electroceramics. 19 (2007), H. 4},
  journal   = {Journal of Electroceramics. 19 (2007), H. 4},
  isbn      = {1385-3449},
  pages     = {407 -- 411},
  year      = {2007},
  language  = {en}
}