@article{SpelthahnPoghossianSchoening2009,
  author    = {Spelthahn, Heiko and Poghossian, Arshak and Sch{\"o}ning, Michael Josef},
  title     = {Self-aligned nanogaps and nanochannels via conventional photolithography and pattern-size reduction technique},
  series = {Electrochimica Acta. 54 (2009), H. 25 Sp. Iss. SI},
  journal   = {Electrochimica Acta. 54 (2009), H. 25 Sp. Iss. SI},
  isbn      = {0013-4686},
  pages     = {6010 -- 6014},
  year      = {2009},
  language  = {en}
}