@article{KaemperPicardBrilletal.2003,
  author    = {K{\"a}mper, Klaus-Peter and Picard, Antoni and Brill, Manfred and Cassel, Detlef (u.a.)},
  title     = {The Virtual Cleanroom - a new tool in teaching MST process technologies},
  series = {mst news International newsletter on micro - nano Integration (2003)},
  journal   = {mst news International newsletter on micro - nano Integration (2003)},
  isbn      = {0948-3128},
  pages     = {35 -- 36},
  year      = {2003},
  language  = {en}
}