@article{IkenAhlbornGerlachetal.2013, author = {Iken, Heiko and Ahlborn, K. and Gerlach, F. and Vonau, W. and Zander, W. and Schubert, J. and Sch{\"o}ning, Michael Josef}, title = {Development of redox glasses and subsequent processing by means of pulsed laser deposition for realizing silicon-based thin-film sensors}, series = {Electrochimica acta}, journal = {Electrochimica acta}, publisher = {Elsevier}, address = {Amsterdam}, issn = {1873-3859 (E-Journal); 0013-4686 (Print)}, pages = {Available online 30.8.2013}, year = {2013}, language = {en} } @article{SchoeningSchubertKloocketal.2002, author = {Sch{\"o}ning, Michael Josef and Schubert, J and Kloock, Joachim P. and Zander, W. and Mourzina, Y. G. and Legin, A. and Vlasov, Y. G. and L{\"u}th, H.}, title = {Innovative thin film techniques for microfabricating electrochemical sensors}, series = {Lecture Notes of the ICB Seminars}, journal = {Lecture Notes of the ICB Seminars}, publisher = {MCB}, address = {Warsaw}, pages = {55 -- 66}, year = {2002}, language = {en} } @article{SchoeningSchubertKloocketal.2001, author = {Sch{\"o}ning, Michael Josef and Schubert, Joachim P. and Kloock, Joachim P. and Zander, W. and Mourzina, Y. G. and Legin, A. and Vlasov, Y. G. and L{\"u}th, H.}, title = {Innovative thin film techniques for microfabricating electrochemical sensors}, series = {Biocybernetics and Biomedical Engineering. 21 (2001), H. 4}, journal = {Biocybernetics and Biomedical Engineering. 21 (2001), H. 4}, isbn = {0208-5216}, pages = {107 -- 119}, year = {2001}, language = {en} } @article{SchoeningPraemassingBeckersetal.1998, author = {Sch{\"o}ning, Michael Josef and Pr{\"a}massing, T. and Beckers, L. and Zander, W.}, title = {Ein langzeitstabiler pH-Sensor auf Siliziumbasis hergestellt in D{\"u}nnschichttechnik mittels Laserablation}, series = {Chemie- und Biosensoren : aktuelle Anwendungen und Entwicklungstrends / 3. Dresdner Sensor-Symposium, 8. - 10. Dezember 1997, Dresden-Radebeul. J. P. Baselt ... (Hg.)}, journal = {Chemie- und Biosensoren : aktuelle Anwendungen und Entwicklungstrends / 3. Dresdner Sensor-Symposium, 8. - 10. Dezember 1997, Dresden-Radebeul. J. P. Baselt ... (Hg.)}, publisher = {Dresden Univ. Press}, address = {Dresden ; M{\"u}nchen}, isbn = {3-933168-03-1}, pages = {99 -- 102}, year = {1998}, language = {de} } @article{SchoeningSchmidtSchubertetal.2000, author = {Sch{\"o}ning, Michael Josef and Schmidt, C. and Schubert, J. and Zander, W. and Mesters, S. and Kordos, P. and L{\"u}th, H. and Legin, A. and Seleznev, B. and Vlasov, Y. G.}, title = {Thin film sensors on the basis of chalcogenide glass materials prepared by pulsed laser deposition technique}, series = {Sensors and Actuators B. 68 (2000), H. 1-3}, journal = {Sensors and Actuators B. 68 (2000), H. 1-3}, isbn = {0925-4005}, pages = {254 -- 259}, year = {2000}, language = {en} } @article{MourzinaSchoeningSchubertetal.2000, author = {Mourzina, Y.G. and Sch{\"o}ning, Michael Josef and Schubert, J. and Zander, W. and Legin, A. V. and Vlasov, Y. G. and Kordos, P. and L{\"u}th, H.}, title = {A new thin film Pb microsensor based on chalcogenide glasses}, series = {Sensors and Actuators B. 71 (2000), H. 1-2}, journal = {Sensors and Actuators B. 71 (2000), H. 1-2}, isbn = {0925-4005}, pages = {13 -- 18}, year = {2000}, language = {en} } @article{SchoeningMourzinaSchubertetal.2001, author = {Sch{\"o}ning, Michael Josef and Mourzina, Y. G. and Schubert, J. and Zander, W. and Legin, A. and Vlasov, Y. G. and L{\"u}th, H.}, title = {Can pulsed laser deposition serve as an advanced technique in fabricating chemical sensors?}, series = {Sensors and Actuators B. 78 (2001), H. 1-3}, journal = {Sensors and Actuators B. 78 (2001), H. 1-3}, isbn = {0925-4005}, pages = {273 -- 278}, year = {2001}, language = {en} } @article{SchubertSchoeningMourzinaetal.2001, author = {Schubert, J. and Sch{\"o}ning, Michael Josef and Mourzina, Y. G. and Legin, A. V. and Vlasov, Y. G. and Zander, W. and L{\"u}th, H.}, title = {Multicomponent thin films for electrochemical sensor applications prepared by pulsed laser deposition}, series = {Sensors and Actuators B. 76 (2001), H. 1-3}, journal = {Sensors and Actuators B. 76 (2001), H. 1-3}, isbn = {0925-4005}, pages = {327 -- 330}, year = {2001}, language = {en} } @article{MourzinaSchubertZanderetal.2001, author = {Mourzina, Yu. G. and Schubert, J and Zander, W. and Legin, A. and Vlasov, Y. G. and L{\"u}th, H. and Sch{\"o}ning, Michael Josef}, title = {Development of multisensor systems based on chalcogenide thin film chemical sensors for the simultaneous multicomponent analysis of metal ions in complex solutions}, series = {Scaling down in electrochemistry : electrochemical micro- and nanosystem technology ; proceedings of the 3rd International Symposium on Electrochemical Microsystem Technologies, Garmisch-Patenkirchen, Germany, 11 - 15 September 2000 / ed. by J. W. Schultz}, journal = {Scaling down in electrochemistry : electrochemical micro- and nanosystem technology ; proceedings of the 3rd International Symposium on Electrochemical Microsystem Technologies, Garmisch-Patenkirchen, Germany, 11 - 15 September 2000 / ed. by J. W. Schultz}, publisher = {Elsevier [u.a.]}, address = {Amsterdam [u.a.]}, isbn = {0-08-044014-2}, pages = {251 -- 263}, year = {2001}, language = {en} } @article{MourzinaSchoeningSchubertetal.2001, author = {Mourzina, Y. G. and Sch{\"o}ning, Michael Josef and Schubert, J. and Zander, W. and Legin, A. V. and Vlasov, Y. G. and L{\"u}th, H.}, title = {Copper, cadmium and thallium thin film sensors based on chalcogenide glasses}, series = {Analytica Chimica Acta. 433 (2001)}, journal = {Analytica Chimica Acta. 433 (2001)}, isbn = {0378-4304}, pages = {103 -- 110}, year = {2001}, language = {en} } @article{SchoeningMourzinaSchubertetal.2001, author = {Sch{\"o}ning, Michael Josef and Mourzina, Yu.G. and Schubert, J. and Zander, W. and Legin, A. and Vlasov, Y. G. and L{\"u}th, H.}, title = {Pulsed laser deposition - an innovative technique for preparing inorganic thin films}, series = {Electroanalysis. 13 (2001), H. 8-9}, journal = {Electroanalysis. 13 (2001), H. 8-9}, isbn = {1040-0397}, pages = {727 -- 732}, year = {2001}, language = {en} } @article{SchubertSchoeningSchmidtetal.1999, author = {Schubert, J. and Sch{\"o}ning, Michael Josef and Schmidt, C. and Siegert, M. and Mesters, S. and Zander, W. and Kordos, P. and L{\"u}th, H. and Legin, A. and Mourzina, Y. G. and Seleznev, B. and Vlasov, Y. G.}, title = {Chalcogenide-based thin film sensors prepared by pulsed laser deposition technique}, series = {Applied Physics A. 69, (1999), H. Supplement 1}, journal = {Applied Physics A. 69, (1999), H. Supplement 1}, isbn = {0947-8396}, doi = {10.1007/s003390051534}, pages = {803 -- 805}, year = {1999}, language = {en} } @article{SchoeningSchaubBeckersetal.1996, author = {Sch{\"o}ning, Michael Josef and Schaub, A. and Beckers, L. and Zander, W.}, title = {D{\"u}nne Al2O3-Schichten f{\"u}r pH-Sensoren auf Halbleiterbasis mittels Laserablation}, series = {Gesellschaft Mess- und Automatisierungstechnik: Sensoren und Messysteme : Tagung Bad Nauheim, 11. bis 13. M{\"a}rz 1996 / VDI/VDE-Gesellschaft Meß- und Automatisierungstechnik.}, journal = {Gesellschaft Mess- und Automatisierungstechnik: Sensoren und Messysteme : Tagung Bad Nauheim, 11. bis 13. M{\"a}rz 1996 / VDI/VDE-Gesellschaft Meß- und Automatisierungstechnik.}, publisher = {VDI-Verl.}, address = {D{\"u}sseldorf}, isbn = {3-18-091255-3}, pages = {381 -- 386}, year = {1996}, language = {de} } @article{SchoeningSchmidtSchubertetal.1999, author = {Sch{\"o}ning, Michael Josef and Schmidt, C. and Schubert, J. and Zander, W. and Kordos, P. and L{\"u}th, H. and Legin, A. and Seleznev, B. and Vlasov, Y. G.}, title = {Thin film sensors on the basis of chalcogenide glass materials prepared by pulsed laser deposition technique}, series = {Proceedings : The Hague, The Netherlands, September 12 - 15, 1999 / [ed. by M. Bartek]. Vol 1.}, journal = {Proceedings : The Hague, The Netherlands, September 12 - 15, 1999 / [ed. by M. Bartek]. Vol 1.}, address = {The Hague, The Netherlands}, isbn = {90-76699-02-X}, pages = {847 -- 850}, year = {1999}, language = {en} } @article{MourzinaLeginVlasovetal.2001, author = {Mourzina, Y. G. and Legin, A. and Vlasov, Y. G. and Sch{\"o}ning, Michael Josef and Schubert, J. and Zander, W. and L{\"u}th, H.}, title = {Thin film chemical sensors based on chalcogenide glasses for „electronic tongue" applications}, series = {Sensor 2001 : 10th international conference, May 8 - 10, 2001, Exhibition Centre Nuremberg, Germany ; proceedings}, journal = {Sensor 2001 : 10th international conference, May 8 - 10, 2001, Exhibition Centre Nuremberg, Germany ; proceedings}, publisher = {AMA Service}, address = {Wunstorf}, pages = {137 -- 141}, year = {2001}, language = {en} } @article{SchoeningMourzinaSchubertetal.2000, author = {Sch{\"o}ning, Michael Josef and Mourzina, Y. G. and Schubert, J. and Zander, W. and Legin, A. and Vlasov, Y. G. and L{\"u}th, H.}, title = {Can pulsed laser deposition serve as an advanced technique in fabricating chemical sensors?}, series = {Proceedings : Copenhagen, Denmark, 27 - 30 August 2000 / [ed.: R. de Reus ...]}, journal = {Proceedings : Copenhagen, Denmark, 27 - 30 August 2000 / [ed.: R. de Reus ...]}, publisher = {MIC, Mikroelektronik Centret}, address = {Lyngby, Denmark}, isbn = {87-89935-50-0}, pages = {615 -- 618}, year = {2000}, language = {en} } @article{MourzinaSchoeningSchubertetal.2000, author = {Mourzina, Yu.G. and Sch{\"o}ning, Michael Josef and Schubert, J. and Zander, W. and Legin, A. and Vlasov, Y. G. and L{\"u}th, H.}, title = {Thin film microsensors for fast heavy metal analysis}, series = {Proceedings : Copenhagen, Denmark, 27 - 30 August 2000 / [ed.: R. de Reus ...]}, journal = {Proceedings : Copenhagen, Denmark, 27 - 30 August 2000 / [ed.: R. de Reus ...]}, publisher = {MIC, Mikroelektronik Centret}, address = {Lyngby, Denmark}, isbn = {87-89935-50-0}, pages = {839 -- 840}, year = {2000}, language = {en} } @article{SchoeningBeckersSchaubetal.1996, author = {Sch{\"o}ning, Michael Josef and Beckers, L. and Schaub, A. and Zander, W. and Schubert, J. and Mesters, S. and Kordos, P. and L{\"u}th, H.}, title = {A novel silicon-based pH sensor prepared by pulsed laser deposition technique}, series = {Proceedings of Eurosensors X, the 10th European Conference on Solid-State Transducers, September 8-11, 1996, Leuven, Belgium / [KU Leuven]. Puers, Robert. Vol. 3.}, journal = {Proceedings of Eurosensors X, the 10th European Conference on Solid-State Transducers, September 8-11, 1996, Leuven, Belgium / [KU Leuven]. Puers, Robert. Vol. 3.}, publisher = {Catholic University Leuven}, address = {Heverlee, Belgium}, isbn = {90-803282-1-9}, pages = {781 -- 784}, year = {1996}, language = {en} } @article{SchoeningSchaubZundeletal.1995, author = {Sch{\"o}ning, Michael Josef and Schaub, A. and Zundel, A. and Beckers, L. and Schubert, J. and Zander, W. and Kordos, P. and L{\"u}th, H.}, title = {Pulsed laser deposition as a novel thin film preparation method for silicon-based field effect sensors}, series = {Proceedings of the 25th European Solid State Device Research Conference : the Netherlands Congress Centre, The Hague, the Netherlands, 25th - 27th September 1995 / ESSDERC '95. Ed. by H. C. de Graaff}, journal = {Proceedings of the 25th European Solid State Device Research Conference : the Netherlands Congress Centre, The Hague, the Netherlands, 25th - 27th September 1995 / ESSDERC '95. Ed. by H. C. de Graaff}, publisher = {Ed. Fronti{\`e}res}, address = {Gif-sur-Yvette}, isbn = {2-86332-182-X}, pages = {601 -- 604}, year = {1995}, language = {en} } @article{BuniatyanMatirosyanAbouzaretal.2009, author = {Buniatyan, Vahe V. and Matirosyan, N. and Abouzar, Maryam H. and Schubert, J. and Zander, W. and Gevorgian, S. and Sch{\"o}ning, Michael Josef and Poghossian, Arshak}, title = {Capacitive field-effect pH sensor based on an electrolyte-ferroelectric-insulator-semiconductor structure}, series = {SENSOR 2009 : : 14th International Conference on Sensors, Technologies, Electronics and Applications; N{\"u}rnberg, Germany, 26 - 28 May 2009; proceedings; [part of] Sensor + Test Conference 2009 / AMA, Fachverband f{\"u}r Sensorik e.V}, journal = {SENSOR 2009 : : 14th International Conference on Sensors, Technologies, Electronics and Applications; N{\"u}rnberg, Germany, 26 - 28 May 2009; proceedings; [part of] Sensor + Test Conference 2009 / AMA, Fachverband f{\"u}r Sensorik e.V}, publisher = {AMA Service}, address = {Wunstorf}, isbn = {9783981099355}, pages = {317 -- 322}, year = {2009}, language = {en} } @inproceedings{HuckPoghossianBaeckeretal.2013, author = {Huck, Christina and Poghossian, Arshak and B{\"a}cker, Matthias and Zander, W. and Schubert, J. and Sukoyan, L. H. and Begoyan, V. and Buniatyan, V. V. and Wagner, Patrick and Sch{\"o}ning, Michael Josef}, title = {Chemische Sensoren mit Bariumstrontiumtitanat als funktionelle Schicht zur Multiparameterdetektion}, series = {11. Dresdner Sensor-Symposium : 9.-11.12.2013}, booktitle = {11. Dresdner Sensor-Symposium : 9.-11.12.2013}, organization = {Dresdner Sensor-Symposium <11, 2013>}, isbn = {978-3-9813484-5-3}, pages = {368 -- 372}, year = {2013}, language = {de} } @article{HuckPoghossianKerroumietal.2014, author = {Huck, Christina and Poghossian, Arshak and Kerroumi, Iman and Schusser, Sebastian and B{\"a}cker, Matthias and Zander, Willi and Schubert, J{\"u}rgen and Buniatyan, Vahe V. and Martirosyan, Norayr W. and Wagner, Patrick and Sch{\"o}ning, Michael Josef}, title = {Multiparameter sensor chip with Barium Strontium Titanate as multipurpose material}, series = {Electroanalysis}, volume = {26}, journal = {Electroanalysis}, number = {5}, publisher = {Wiley-VCH}, address = {Weinheim}, issn = {1521-4109 (E-Journal); 1040-0397 (Print)}, doi = {10.1002/elan.201400076}, pages = {980 -- 987}, year = {2014}, abstract = {It is well known that biochemical and biotechnological processes are strongly dependent and affected by a variety of physico-chemical parameters such as pH value, temperature, pressure and electrolyte conductivity. Therefore, these quantities have to be monitored or controlled in order to guarantee a stable process operation, optimization and high yield. In this work, a sensor chip for the multiparameter detection of three physico-chemical parameters such as electrolyte conductivity, pH and temperature is realized using barium strontium titanate (BST) as multipurpose material. The chip integrates a capacitively coupled four-electrode electrolyte-conductivity sensor, a capacitive field-effect pH sensor and a thin-film Pt-temperature sensor. Due to the multifunctional properties of BST, it is utilized as final outermost coating layer of the processed sensor chip and serves as passivation and protection layer as well as pH-sensitive transducer material at the same time. The results of testing of the individual sensors of the developed multiparameter sensor chip are presented. In addition, a quasi-simultaneous multiparameter characterization of the sensor chip in buffer solutions with different pH value and electrolyte conductivity is performed. To study the sensor behavior and the suitability of BST as multifunctional material under harsh environmental conditions, the sensor chip was exemplarily tested in a biogas digestate.}, language = {en} } @article{HuckPoghossianBaeckeretal.2014, author = {Huck, Christina and Poghossian, Arshak and B{\"a}cker, Matthias and Chaudhuri, S. and Zander, W. and Schubert, J. and Begoyan, V. K. and Buniatyan, V. V. and Wagner, P. and Sch{\"o}ning, Michael Josef}, title = {Capacitively coupled electrolyte-conductivity sensor based on high-k material of barium strontium titanate}, series = {Sensors and actuators. B: Chemical}, journal = {Sensors and actuators. B: Chemical}, number = {198}, publisher = {Elsevier}, address = {Amsterdam}, issn = {1873-3077 (E-Journal); 0925-4005 (Print)}, doi = {10.1016/j.snb.2014.02.103}, pages = {102 -- 109}, year = {2014}, language = {en} } @article{HuckPoghossianBaeckeretal.2014, author = {Huck, Christina and Poghossian, Arshak and B{\"a}cker, Matthias and Reisert, Steffen and Schubert, J. and Zander, W. and Begoyan, V. K. and Buniatyan, V. V. and Sch{\"o}ning, Michael Josef}, title = {Chemical sensors based on a high-k perovskite oxide of barium strontium titanate}, series = {Procedia Engineering}, volume = {87}, journal = {Procedia Engineering}, publisher = {Elsevier}, address = {Amsterdam}, issn = {1877-7058}, doi = {10.1016/j.proeng.2014.11.258}, pages = {28 -- 31}, year = {2014}, abstract = {High-k perovskite oxide of barium strontium titanate (BST) represents a very attractive multi-functional transducer material for the development of (bio-)chemical sensors for liquids. In this work, BST films have been applied as a sensitive transducer material for a label-free detection of adsorbed charged macromolecules (positively charged polyelectrolytes) and concentration of hydrogen peroxide vapor as well as protection insulator layer for a contactless electrolyte-conductivity sensor. The experimental results of characterization of individual sensors are presented. Special emphasis is devoted towards the development of a capacitively-coupled contactless electrolyte-conductivity sensor.}, language = {en} }