TY  - JOUR
A1  - Prume, Klaus
A1  - Gerber, P.
A1  - Roelofs, A.
A1  - Kügeler, C.
T1  - Effects of the top-electrode size on the piezoelectric properties (d33 and S) of lead zirconate titanate thin films / Gerber, P. ; Roelofs, A. ; Kügeler, C.;  Böttger, U. ; Waser, R. ; Prume, K. ;
JF  - Journal of Applied Physics  . 96 (2004), H. 5
Y1  - 2004
SN  - 0021-8979
SP  - 2800
EP  - 2804
ER  -