TY  - CHAP
A1  - Spannhake, Jan
A1  - Schulz, Olaf
A1  - Helwig, Andreas
A1  - Krenkow, Angelika
A1  - Müller, Gerhard
A1  - Doll, Theodor
T1  - High-temperature MEMS heater platforms: long-term performance of metal and semiconductor heater materials
N2  - Micromachined thermal heater platforms offer low electrical power consumption and high modulation speed, i.e. properties which are advantageous for realizing nondispersive infrared (NDIR) gas- and liquid monitoring systems. In this paper, we report on investigations on silicon-on-insulator (SOI) based infrared (IR) emitter devices heated by employing different kinds of metallic and semiconductor heater materials. Our results clearly reveal the superior high-temperature performance of semiconductor over metallic heater materials. Long-term stable emitter operation in the vicinity of 1300 K could be attained using heavily antimony-doped tin dioxide (SnO2:Sb) heater elements.
KW  - Biosensor
KW  - Hotplate
KW  - heater metallisation
KW  - high-temperature stability
KW  - electro-migration
KW  - doped silicon
KW  - doped metal oxide
KW  - antimony doped tin oxide
Y1  - 2006
U6  - http://nbn-resolving.de/urn/resolver.pl?urn:nbn:de:hbz:a96-opus-1513
ER  -