TY  - JOUR
A1  - Iken, Heiko
A1  - Ahlborn, K.
A1  - Gerlach, F.
A1  - Vonau, W.
A1  - Zander, W.
A1  - Schubert, J.
A1  - Schöning, Michael Josef
T1  - Development of redox glasses and subsequent processing by means of pulsed laser deposition for realizing silicon-based thin-film sensors
JF  - Electrochimica acta
Y1  - 2013
SN  - 1873-3859 (E-Journal); 0013-4686 (Print)
SP  - Available online 30.8.2013
PB  - Elsevier
CY  - Amsterdam
ER  - 
TY  - JOUR
A1  - Schöning, Michael Josef
A1  - Schubert, J
A1  - Kloock, Joachim P.
A1  - Zander, W.
A1  - Mourzina, Y. G.
A1  - Legin, A.
A1  - Vlasov, Y. G.
A1  - Lüth, H.
T1  - Innovative thin film techniques for microfabricating electrochemical sensors
JF  - Lecture Notes of the ICB Seminars
Y1  - 2002
SP  - 55
EP  - 66
PB  - MCB
CY  - Warsaw
ER  - 
TY  - JOUR
A1  - Schöning, Michael Josef
A1  - Schubert, Joachim P.
A1  - Kloock, Joachim P.
A1  - Zander, W.
A1  - Mourzina, Y. G.
A1  - Legin, A.
A1  - Vlasov, Y. G.
A1  - Lüth, H.
T1  - Innovative thin film techniques for microfabricating electrochemical sensors
JF  - Biocybernetics and Biomedical Engineering. 21 (2001), H. 4
Y1  - 2001
SN  - 0208-5216
SP  - 107
EP  - 119
ER  - 
TY  - JOUR
A1  - Schöning, Michael Josef
A1  - Prämassing, T.
A1  - Beckers, L.
A1  - Zander, W.
T1  - Ein langzeitstabiler pH-Sensor auf Siliziumbasis hergestellt in Dünnschichttechnik mittels Laserablation
JF  - Chemie- und Biosensoren : aktuelle Anwendungen und Entwicklungstrends / 3. Dresdner Sensor-Symposium, 8. - 10. Dezember 1997, Dresden-Radebeul. J. P. Baselt ... (Hg.)
Y1  - 1998
SN  - 3-933168-03-1
N1  - Serie Dresdner Beiträge zur Sensorik ; 5
SP  - 99
EP  - 102
PB  - Dresden Univ. Press
CY  - Dresden ; München
ER  - 
TY  - JOUR
A1  - Schöning, Michael Josef
A1  - Schmidt, C.
A1  - Schubert, J.
A1  - Zander, W.
A1  - Mesters, S.
A1  - Kordos, P.
A1  - Lüth, H.
A1  - Legin, A.
A1  - Seleznev, B.
A1  - Vlasov, Y. G.
T1  - Thin film sensors on the basis of chalcogenide glass materials prepared by pulsed laser deposition technique
JF  - Sensors and Actuators B. 68 (2000), H. 1-3
Y1  - 2000
SN  - 0925-4005
SP  - 254
EP  - 259
ER  - 
TY  - JOUR
A1  - Mourzina, Y.G.
A1  - Schöning, Michael Josef
A1  - Schubert, J.
A1  - Zander, W.
A1  - Legin, A. V.
A1  - Vlasov, Y. G.
A1  - Kordos, P.
A1  - Lüth, H.
T1  - A new thin film Pb microsensor based on chalcogenide glasses
JF  - Sensors and Actuators B. 71 (2000), H. 1-2
Y1  - 2000
SN  - 0925-4005
SP  - 13
EP  - 18
ER  - 
TY  - JOUR
A1  - Schöning, Michael Josef
A1  - Mourzina, Y. G.
A1  - Schubert, J.
A1  - Zander, W.
A1  - Legin, A.
A1  - Vlasov, Y. G.
A1  - Lüth, H.
T1  - Can pulsed laser deposition serve as an advanced technique in fabricating chemical sensors?
JF  - Sensors and Actuators B. 78 (2001), H. 1-3
Y1  - 2001
SN  - 0925-4005
N1  - Selected Papers form Eurosensors XIV
SP  - 273
EP  - 278
ER  - 
TY  - JOUR
A1  - Schubert, J.
A1  - Schöning, Michael Josef
A1  - Mourzina, Y. G.
A1  - Legin, A. V.
A1  - Vlasov, Y. G.
A1  - Zander, W.
A1  - Lüth, H.
T1  - Multicomponent thin films for electrochemical sensor applications prepared by pulsed laser deposition
JF  - Sensors and Actuators B. 76 (2001), H. 1-3
Y1  - 2001
SN  - 0925-4005
SP  - 327
EP  - 330
ER  - 
TY  - JOUR
A1  - Mourzina, Yu. G.
A1  - Schubert, J
A1  - Zander, W.
A1  - Legin, A.
A1  - Vlasov, Y. G.
A1  - Lüth, H.
A1  - Schöning, Michael Josef
T1  - Development of multisensor systems based on chalcogenide thin film chemical sensors for the simultaneous multicomponent analysis of metal ions in complex solutions
JF  - Scaling down in electrochemistry : electrochemical micro- and nanosystem technology ; proceedings of the 3rd International Symposium on Electrochemical Microsystem Technologies, Garmisch-Patenkirchen, Germany, 11 - 15 September 2000 / ed. by J. W. Schultz
Y1  - 2001
SN  - 0-08-044014-2
SP  - 251
EP  - 263
PB  - Elsevier [u.a.]
CY  - Amsterdam [u.a.]
ER  - 
TY  - JOUR
A1  - Mourzina, Y. G.
A1  - Schöning, Michael Josef
A1  - Schubert, J.
A1  - Zander, W.
A1  - Legin, A. V.
A1  - Vlasov, Y. G.
A1  - Lüth, H.
T1  - Copper, cadmium and thallium thin film sensors based on chalcogenide glasses
JF  - Analytica Chimica Acta. 433 (2001)
Y1  - 2001
SN  - 0378-4304
SP  - 103
EP  - 110
ER  - 
TY  - JOUR
A1  - Schöning, Michael Josef
A1  - Mourzina, Yu.G.
A1  - Schubert, J.
A1  - Zander, W.
A1  - Legin, A.
A1  - Vlasov, Y. G.
A1  - Lüth, H.
T1  - Pulsed laser deposition – an innovative technique for preparing inorganic thin films
JF  - Electroanalysis. 13 (2001), H. 8-9
Y1  - 2001
SN  - 1040-0397
SP  - 727
EP  - 732
ER  - 
TY  - JOUR
A1  - Schubert, J.
A1  - Schöning, Michael Josef
A1  - Schmidt, C.
A1  - Siegert, M.
A1  - Mesters, S.
A1  - Zander, W.
A1  - Kordos, P.
A1  - Lüth, H.
A1  - Legin, A.
A1  - Mourzina, Y. G.
A1  - Seleznev, B.
A1  - Vlasov, Y. G.
T1  - Chalcogenide-based thin film sensors prepared by pulsed laser deposition technique
JF  - Applied Physics A. 69, (1999), H. Supplement 1
Y1  - 1999
SN  - 0947-8396
U6  - http://dx.doi.org/10.1007/s003390051534
SP  - 803
EP  - 805
ER  - 
TY  - JOUR
A1  - Schöning, Michael Josef
A1  - Schaub, A.
A1  - Beckers, L.
A1  - Zander, W.
T1  - Dünne Al2O3-Schichten für pH-Sensoren auf Halbleiterbasis mittels Laserablation
JF  - Gesellschaft Mess- und Automatisierungstechnik: Sensoren und Messysteme : Tagung Bad Nauheim, 11. bis 13. März 1996 / VDI/VDE-Gesellschaft Meß- und Automatisierungstechnik.
Y1  - 1996
SN  - 3-18-091255-3
N1  - VDI-Berichte; 1255
SP  - 381
EP  - 386
PB  - VDI-Verl.
CY  - Düsseldorf
ER  - 
TY  - JOUR
A1  - Schöning, Michael Josef
A1  - Schmidt, C.
A1  - Schubert, J.
A1  - Zander, W.
A1  - Kordos, P.
A1  - Lüth, H.
A1  - Legin, A.
A1  - Seleznev, B.
A1  - Vlasov, Y. G.
T1  - Thin film sensors on the basis of chalcogenide glass materials prepared by pulsed laser deposition technique
JF  - Proceedings : The Hague, The Netherlands, September 12 - 15, 1999 / [ed. by M. Bartek]. Vol 1.
Y1  - 1999
SN  - 90-76699-02-X
N1  - Eurosensors ; (13, 1999, 's-Gravenhage) ; Eurosensors ; (13 : ; 1999.09.12-15 : ; The Hague) ; European Conference on Solid-State Transducers ; (13 : ; 1999.09.12-15 : ; The Hague)
SP  - 847
EP  - 850
CY  - The Hague, The Netherlands
ER  - 
TY  - JOUR
A1  - Mourzina, Y. G.
A1  - Legin, A.
A1  - Vlasov, Y. G.
A1  - Schöning, Michael Josef
A1  - Schubert, J.
A1  - Zander, W.
A1  - Lüth, H.
T1  - Thin film chemical sensors based on chalcogenide glasses for „electronic tongue“ applications
JF  - Sensor 2001 : 10th international conference, May 8 - 10, 2001, Exhibition Centre Nuremberg, Germany ; proceedings
Y1  - 2001
N1  - Sensor-Kongress ; (10, 2001, Nürnberg) Sensor 2001 Conference ; (10 : ; 2001.05.08-10 : ; Nuremberg)
SP  - 137
EP  - 141
PB  - AMA Service
CY  - Wunstorf
ER  - 
TY  - JOUR
A1  - Schöning, Michael Josef
A1  - Mourzina, Y. G.
A1  - Schubert, J.
A1  - Zander, W.
A1  - Legin, A.
A1  - Vlasov, Y. G.
A1  - Lüth, H.
T1  - Can pulsed laser deposition serve as an advanced technique in fabricating chemical sensors?
JF  - Proceedings : Copenhagen, Denmark, 27 - 30 August 2000 / [ed.: R. de Reus ...]
Y1  - 2000
SN  - 87-89935-50-0
N1  - Eurosensors ; (14, 2000, København) ; Eurosensors ; (14 : ; 2000.08.27-30 : ; Copenhagen) ; European Conference on Solid-State Transducers ; (14 : ; 2000.08.27-30 : ; Copenhagen)
SP  - 615
EP  - 618
PB  - MIC, Mikroelektronik Centret
CY  - Lyngby, Denmark
ER  - 
TY  - JOUR
A1  - Mourzina, Yu.G.
A1  - Schöning, Michael Josef
A1  - Schubert, J.
A1  - Zander, W.
A1  - Legin, A.
A1  - Vlasov, Y. G.
A1  - Lüth, H.
T1  - Thin film microsensors for fast heavy metal analysis
JF  - Proceedings : Copenhagen, Denmark, 27 - 30 August 2000 / [ed.: R. de Reus ...]
Y1  - 2000
SN  - 87-89935-50-0
N1  - Eurosensors ; (14, 2000, København) ; Eurosensors ; (14 : ; 2000.08.27-30 : ; Copenhagen) ; European Conference on Solid-State Transducers ; (14 : ; 2000.08.27-30 : ; Copenhagen)
SP  - 839
EP  - 840
PB  - MIC, Mikroelektronik Centret
CY  - Lyngby, Denmark
ER  - 
TY  - JOUR
A1  - Schöning, Michael Josef
A1  - Beckers, L.
A1  - Schaub, A.
A1  - Zander, W.
A1  - Schubert, J.
A1  - Mesters, S.
A1  - Kordos, P.
A1  - Lüth, H.
T1  - A novel silicon-based pH sensor prepared by pulsed laser deposition technique
JF  - Proceedings of Eurosensors X, the 10th European Conference on Solid-State Transducers, September 8-11, 1996, Leuven, Belgium / [KU Leuven]. Puers, Robert.  Vol. 3.
Y1  - 1996
SN  - 90-803282-1-9
N1  - Eurosensors ; (10, 1996, Louvain) Eurosensors, the European Conference on Solid-State Transducers ; (10 : ; 1996.09.08-11 : ; Leuven)
SP  - 781
EP  - 784
PB  - Catholic University Leuven
CY  - Heverlee, Belgium
ER  - 
TY  - JOUR
A1  - Schöning, Michael Josef
A1  - Schaub, A.
A1  - Zundel, A.
A1  - Beckers, L.
A1  - Schubert, J.
A1  - Zander, W.
A1  - Kordos, P.
A1  - Lüth, H.
T1  - Pulsed laser deposition as a novel thin film preparation method for silicon-based field effect sensors
JF  - Proceedings of the 25th European Solid State Device Research Conference : the Netherlands Congress Centre, The Hague, the Netherlands, 25th - 27th September 1995 / ESSDERC '95. Ed. by H. C. de Graaff
Y1  - 1995
SN  - 2-86332-182-X
N1  - ESSDERC ; (25, 1995, 's-Gravenhage) ; European Solid State Device Research Conference (ESSDERC) ; (25 : ; 1995.09.25-27 : ; Den Haag)
SP  - 601
EP  - 604
PB  - Ed. Frontières
CY  - Gif-sur-Yvette
ER  - 
TY  - JOUR
A1  - Buniatyan, Vahe V.
A1  - Matirosyan, N.
A1  - Abouzar, Maryam H.
A1  - Schubert, J.
A1  - Zander, W.
A1  - Gevorgian, S.
A1  - Schöning, Michael Josef
A1  - Poghossian, Arshak
T1  - Capacitive field-effect pH sensor based on an electrolyte-ferroelectric-insulator-semiconductor structure
JF  - SENSOR 2009 : : 14th International Conference on Sensors, Technologies, Electronics and Applications; Nürnberg, Germany, 26 - 28 May 2009; proceedings; [part of] Sensor + Test Conference 2009 / AMA, Fachverband für Sensorik e.V
Y1  - 2009
SN  - 9783981099355
N1  - AMA, Fachverband für Sensorik ; Sensor International Conference ; (14 : ; 2009.05.26-28 : ; Nürnberg)
SP  - 317
EP  - 322
PB  - AMA Service
CY  - Wunstorf
ER  - 
TY  - CHAP
A1  - Huck, Christina
A1  - Poghossian, Arshak
A1  - Bäcker, Matthias
A1  - Zander, W.
A1  - Schubert, J.
A1  - Sukoyan, L. H.
A1  - Begoyan, V.
A1  - Buniatyan, V. V.
A1  - Wagner, Patrick
A1  - Schöning, Michael Josef
T1  - Chemische Sensoren mit Bariumstrontiumtitanat als funktionelle Schicht zur Multiparameterdetektion
T2  - 11. Dresdner Sensor-Symposium : 9.-11.12.2013
Y1  - 2013
SN  - 978-3-9813484-5-3
SP  - 368
EP  - 372
ER  - 
TY  - JOUR
A1  - Huck, Christina
A1  - Poghossian, Arshak
A1  - Kerroumi, Iman
A1  - Schusser, Sebastian
A1  - Bäcker, Matthias
A1  - Zander, Willi
A1  - Schubert, Jürgen
A1  - Buniatyan, Vahe V.
A1  - Martirosyan, Norayr W.
A1  - Wagner, Patrick
A1  - Schöning, Michael Josef
T1  - Multiparameter sensor chip with Barium Strontium Titanate as multipurpose material
JF  - Electroanalysis
N2  - It is well known that biochemical and biotechnological processes are strongly dependent and affected by a variety of physico-chemical parameters such as pH value, temperature, pressure and electrolyte conductivity. Therefore, these quantities have to be monitored or controlled in order to guarantee a stable process operation, optimization and high yield. In this work, a sensor chip for the multiparameter detection of three physico-chemical parameters such as electrolyte conductivity, pH and temperature is realized using barium strontium titanate (BST) as multipurpose material. The chip integrates a capacitively coupled four-electrode electrolyte-conductivity sensor, a capacitive field-effect pH sensor and a thin-film Pt-temperature sensor. Due to the multifunctional properties of BST, it is utilized as final outermost coating layer of the processed sensor chip and serves as passivation and protection layer as well as pH-sensitive transducer material at the same time. The results of testing of the individual sensors of the developed multiparameter sensor chip are presented. In addition, a quasi-simultaneous multiparameter characterization of the sensor chip in buffer solutions with different pH value and electrolyte conductivity is performed. To study the sensor behavior and the suitability of BST as multifunctional material under harsh environmental conditions, the sensor chip was exemplarily tested in a biogas digestate.
Y1  - 2014
U6  - http://dx.doi.org/10.1002/elan.201400076
SN  - 1521-4109 (E-Journal); 1040-0397 (Print)
VL  - 26
IS  - 5
SP  - 980
EP  - 987
PB  - Wiley-VCH
CY  - Weinheim
ER  - 
TY  - JOUR
A1  - Huck, Christina
A1  - Poghossian, Arshak
A1  - Bäcker, Matthias
A1  - Chaudhuri, S.
A1  - Zander, W.
A1  - Schubert, J.
A1  - Begoyan, V. K.
A1  - Buniatyan, V. V.
A1  - Wagner, P.
A1  - Schöning, Michael Josef
T1  - Capacitively coupled electrolyte-conductivity sensor based on high-k material of barium strontium titanate
JF  - Sensors and actuators. B: Chemical
Y1  - 2014
U6  - http://dx.doi.org/10.1016/j.snb.2014.02.103
SN  - 1873-3077 (E-Journal); 0925-4005 (Print)
IS  - 198
SP  - 102
EP  - 109
PB  - Elsevier
CY  - Amsterdam
ER  - 
TY  - JOUR
A1  - Huck, Christina
A1  - Poghossian, Arshak
A1  - Bäcker, Matthias
A1  - Reisert, Steffen
A1  - Schubert, J.
A1  - Zander, W.
A1  - Begoyan, V. K.
A1  - Buniatyan, V. V.
A1  - Schöning, Michael Josef
T1  - Chemical sensors based on a high-k perovskite oxide of barium strontium titanate
JF  - Procedia Engineering
N2  - High-k perovskite oxide of barium strontium titanate (BST) represents a very attractive multi-functional transducer material for the development of (bio-)chemical sensors for liquids. In this work, BST films have been applied as a sensitive transducer material for a label-free detection of adsorbed charged macromolecules (positively charged polyelectrolytes) and concentration of hydrogen peroxide vapor as well as protection insulator layer for a contactless electrolyte-conductivity sensor. The experimental results of characterization of individual sensors are presented. Special emphasis is devoted towards the development of a capacitively-coupled contactless electrolyte-conductivity sensor.
KW  - barium strontium titanate
KW  - high-k material
KW  - contactless conductivity sensor
KW  - multi-functional material
KW  - hydrogen peroxide
Y1  - 2014
U6  - http://dx.doi.org/10.1016/j.proeng.2014.11.258
SN  - 1877-7058
N1  - EUROSENSORS 2014 ; European Conference on Solid-State Transducers <28, 2014>
VL  - 87
SP  - 28
EP  - 31
PB  - Elsevier
CY  - Amsterdam
ER  -