The Virtual Clean Room - a new tool in teaching MST process technologies

  • The Virtual Clean Room - a new tool in teaching MST process technologies University education in high-technology fields like MST is not complete without intensive laboratory sessions. Students cannot fully grasp the complexity and the special problems related to the manufacturing of microsystems without a thorough hands-on experience in a MST clean room.

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Metadaten
Author:Klaus-Peter Kämper, Antoni Picard, Manfred Brill, Detlev Cassel, Andreas Jentsch, Sabine Merten, Markus Rollwa
DOI:http://dx.doi.org/10.21269/86
Document Type:Article
Language:English
Year of Completion:2003
Contributing Corporation:FH Kaiserslautern/Zweibrücken
Date of the Publication (Server):2005/12/21
Tag:MST
virtual clean room
GND Keyword:Mikrosystemtechnik; VM; Virtuelle Maschine
Source:mst news International newsletter on micro - nano Integration(2003), H.
Institutes:FH Aachen / Fachbereich Maschinenbau und Mechatronik
Dewey Decimal Classification:6 Technik, Medizin, angewandte Wissenschaften / 62 Ingenieurwissenschaften / 620 Ingenieurwissenschaften und zugeordnete Tätigkeiten

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