Can pulsed laser deposition serve as an advanced technique in fabricating chemical sensors?

Export metadata

Additional Services

Share in Twitter Search Google Scholar
Metadaten
Author:Michael Josef SchöningORCiD, Y. G. Mourzina, J. Schubert, W. Zander, A. Legin, Y. G. Vlasov, H. Lüth
ISBN:87-89935-50-0
Parent Title (English):Proceedings : Copenhagen, Denmark, 27 - 30 August 2000 / [ed.: R. de Reus ...]
Publisher:MIC, Mikroelektronik Centret
Place of publication:Lyngby, Denmark
Document Type:Article
Language:English
Year of Completion:2000
Date of the Publication (Server):2012/12/18
Length:1 CD-ROM
First Page:615
Last Page:618
Note:
Eurosensors ; (14, 2000, København) ; Eurosensors ; (14 : ; 2000.08.27-30 : ; Copenhagen) ; European Conference on Solid-State Transducers ; (14 : ; 2000.08.27-30 : ; Copenhagen)
Institutes:FH Aachen / Fachbereich Medizintechnik und Technomathematik
FH Aachen / INB - Institut für Nano- und Biotechnologien