TY  - JOUR
A1  - Heuermann, Holger
A1  - Schiek, B.
T1  - 15-term self-calibration methods for the error-correction of on-wafer measurements
T2  - IEEE transactions on instrumentation and measurement : IM / Institute of Electrical and Electronics Engineers, Instrumentation and Measurement Group. 46 (1997), H. 5
Y1  - 1997
UR  - https://opus.bibliothek.fh-aachen.de/opus4/frontdoor/index/index/docId/444
SN  - 0018-9456
SP  - 1105
EP  - 1110
ER  -