@inproceedings{MertenConradKaemperetal.2007,
  author    = {Sabine Merten and Thorsten Conrad and Klaus-Peter K{\"a}mper and Antoni Picard and Andreas Sch{\"u}tze},
  title     = {Virtual Technology Labs - an efficient tool for the preparation of hands-on-MEMS-courses in training foundries},
  year      = {2007},
}