@article{SchoeningSimonisRugeetal.2006,
  author    = {Michael Josef Sch{\"o}ning and Anette Simonis and Christian Ruge and Holger Ecken and Mattea M{\"u}ller-Veggian and Hans L{\"u}th},
  title     = {A (bio-)chemical Field-effect Sensor with Macroporous Si as Substrate Material and a SiO₂ / LPCVD-Si₃N₄ Double Layer as pH Transducer},
  journal   = {Sensors. 2 (2002), H. 1},
  pages     = {11 -- 22},
  doi       = {10.3390/s20100011},
  year      = {2006},
}