@article{SchoeningKloockMourzinaetal.2006, author = {Michael Josef Sch{\"o}ning and Joachim P. Kloock and Y. Mourzina and J. Schubert}, title = {A first step towards a microfabricated thin-film sensor array on the basis of chalcogenide glass materials}, journal = {Sensors. 2 (2002), H. 9}, pages = {356 -- 365}, year = {2006}, }