TY  - JOUR
A1  - Schöning, Michael Josef
A1  - Kloock, Joachim P.
A1  - Mourzina, Y.
A1  - Schubert, J.
T1  - A first step towards a microfabricated thin-film sensor array on the basis of chalcogenide glass materials
T2  - Sensors. 2 (2002), H. 9
Y1  - 2002
UR  - https://opus.bibliothek.fh-aachen.de/opus4/frontdoor/index/index/docId/1792
SN  - 1424-8220
SP  - 356
EP  - 365
ER  -