@article{FoersterMalindretosIndlekoferetal.2006, author = {Arnold F{\"o}rster and J{\"o}rg Malindretos and Klaus Michael Indlekofer and Mihail Ion Lepsa}, title = {Homogeneity analysis of ion-implanted resonant tunnelling diodes for applications in digital logic circuits. Malindretos, J{\"o}rg; F{\"o}rster, Arno; Indlekofer, Klaus Michael; Lepsa, Mihail Ion; Hardtdegen, Hilde; Schmidt, Roland; Luth, Hans}, journal = {Superlattices and Microstructures. 31 (2002), H. 6}, pages = {315 -- 325}, year = {2006}, }