TY  - CONF
A1  - Otten, D.
A1  - Schmidt, M.
A1  - Weber, Tobias
T1  - Advances in Determination of Material Parameters for Functional Simulations Based on Process Simulations
T2  - SAMPE Europe Conference 16 Liege
Y1  - 2016
UR  - https://opus.bibliothek.fh-aachen.de/opus4/frontdoor/index/index/docId/9292
SN  - 978-1-5108-3800-0
SP  - 570
EP  - 577
ER  -