@article{PrumeRaederTyholdtetal.2010,
  author    = {Klaus Prume and H. Raeder and F. Tyholdt and W. E. Booij},
  title     = {Taking piezoelectric microsystems from the laboratory to production / Raeder, H. ; Tyholdt, F. ; Booij, W. ; Calame, F. ; Ostbo, N. P. ; Bredesen, R. ; Prume, K. ; Rijnders, G. ; Muralt, P.},
  journal   = {Journal of Electroceramics. 19 (2007), H. 4},
  pages     = {357 -- 362},
  year      = {2010},
}