TY  - JOUR
A1  - Yoshinobu, T.
A1  - Schöning, Michael Josef
A1  - Finger, F.
A1  - Moritz, W.
A1  - Iwasaki, H.
T1  - Fabrication of thin-film LAPS with amorphous silicon
T2  - Sensors. 4 (2004), H. 10
Y1  - 2004
UR  - https://opus.bibliothek.fh-aachen.de/opus4/frontdoor/index/index/docId/1751
SN  - 1424-8220
SP  - 163
EP  - 169
ER  -