TY  - JOUR
A1  - Prume, Klaus
T1  - Electrical and electromechanical characterization of piezoelectric thin films in view of MEMS application  /  Tiedke, S. ; Prume, K. ; Schmitz-Kempen, T.;
Y1  - 2007
UR  - https://opus.bibliothek.fh-aachen.de/opus4/frontdoor/index/index/docId/4052
N1  - ISAF 2007. Sixteenth IEEE International Symposium on  Applications of Ferroelectrics, 2007
SP  - 702
ER  -