@article{KaemperPicardBrilletal.2005,
  author    = {Klaus-Peter K{\"a}mper and Antoni Picard and Manfred Brill and Detlef (u.a.) Cassel},
  title     = {The Virtual Cleanroom - a new tool in teaching MST process technologies},
  journal   = {mst news International newsletter on micro - nano Integration (2003)},
  pages     = {35 -- 36},
  year      = {2005},
}