@article{LuethThustSteffenetal.2006,
  author    = {H. L{\"u}th and M. Thust and A. Steffen and P. Kordos and Michael Josef Sch{\"o}ning},
  title     = {Biochemical sensors with structured and porous silicon capacitors},
  journal   = {Materials Science and Engineering B. 69-70 (2000)},
  pages     = {104 -- 108},
  year      = {2006},
}