@article{PoghossianWagnerSchoening2011, author = {Arshak Poghossian and Holger Wagner and Michael Josef Sch{\"o}ning}, title = {Functional testing and characterisation of (bio-)chemical sensors on wafer level}, journal = {Sensors and Actuators B: Chemical. 154 (2011), H. 2}, pages = {169 -- 173}, year = {2011}, }