TY  - JOUR
A1  - Kämper, Klaus-Peter
A1  - Picard, Antoni
A1  - Brill, Manfred
A1  - Cassel, Detlef (u.a.)
T1  - The Virtual Cleanroom – a new tool in teaching MST process technologies
T2  - mst news International newsletter on micro - nano Integration (2003)
Y1  - 2003
UR  - https://opus.bibliothek.fh-aachen.de/opus4/frontdoor/index/index/docId/729
SN  - 0948-3128
SP  - 35
EP  - 36
ER  -