TY  - JOUR
A1  - Kurowski, A.
A1  - Schultze, J.
A1  - Lüth, H.
A1  - Schöning, Michael Josef
T1  - Micro- and nanopatterning of sensor chips by means of macroporous silicon.
T2  - Sensors and Actuators B. 83 (2002), H. 1-3
Y1  - 2002
UR  - https://opus.bibliothek.fh-aachen.de/opus4/frontdoor/index/index/docId/1797
SN  - 0925-4005
N1  - Selected Papers from TRANSDUCERS '01 EUROSENSORS XV
SP  - 123
EP  - 128
ER  -