@article{SchoeningNaetherAugeretal.2006,
  author    = {Michael Josef Sch{\"o}ning and Niko N{\"a}ther and V. Auger and Arshak Poghossian and M. Koudelka-Hep},
  title     = {Miniaturized flow-through cell with integrated capacitive EIS sensors fabricated at wafer level using Si and Su-8 technologies},
  journal   = {Technical digest of the 10th International Meeting on Chemical Sensors, July 11 - 14, 2004, Tsukuba, Japan / Japan Association of Chemical Sensors},
  pages     = {554 -- 555},
  year      = {2006},
}