TY  - JOUR
A1  - Schöning, Michael Josef
A1  - Näther, Niko
A1  - Auger, V.
A1  - Poghossian, Arshak
A1  - Koudelka-Hep, M.
T1  - Miniaturized flow-through cell with integrated capacitive EIS sensors fabricated at wafer level using Si and Su-8 technologies
T2  - Technical digest of the 10th International Meeting on Chemical Sensors, July 11 - 14, 2004, Tsukuba, Japan / Japan Association of Chemical Sensors
Y1  - 2004
UR  - https://opus.bibliothek.fh-aachen.de/opus4/frontdoor/index/index/docId/1971
N1  - Chemical sensors ; 20.2004 Suppl. B. IMCS ; (10, 2004, Tsukuba) ; International Meeting on Chemical Sensors ; (10 : ; 2004.07.11-14 : ; Tsukuba)
SP  - 554
EP  - 555
PB  - Japan Association of Chemical Sensors
CY  - Fukuoka
ER  -