TY - JOUR A1 - Schöning, Michael Josef A1 - Schubert, Jürgen A1 - Zander, Willy A1 - Müller-Veggian, Mattea T1 - Pulsed laser deposition as a novel preparation technique for chemical microsensors T2 - Proceedings of SPIE 3857, Chemical Microsenors and Applications II, 124 (November 18, 1999). 3857 (1999) Y1 - 1999 UR - https://opus.bibliothek.fh-aachen.de/opus4/frontdoor/index/index/docId/1805 SP - 124 EP - 134 ER -