@article{PrumeMuraltCalameetal.2010,
  author    = {Klaus Prume and Paul Muralt and Florian Calame and Thorsten Schmitz-Kempen},
  title     = {Extensive electromechanical characterization of PZT thin films for MEMS applications by electrical and mechanical excitation signals / Prume, Klaus ; Muralt, Paul ; Calame, Florian ; Schmitz-Kempen, Thorsten ; Tiedke, Stephan},
  journal   = {Journal of Electroceramics. 19 (2007), H. 4},
  pages     = {407 -- 411},
  year      = {2010},
}