@article{KurowskiSchultzeLuethetal.2006,
  author    = {A. Kurowski and J. Schultze and H. L{\"u}th and Michael Josef Sch{\"o}ning},
  title     = {Micro- and nanopatterning of sensor chips by means of macroporous silicon.},
  journal   = {Sensors and Actuators B. 83 (2002), H. 1-3},
  pages     = {123 -- 128},
  year      = {2006},
}