@article{SpelthahnPoghossianSchoening2010, author = {Heiko Spelthahn and Arshak Poghossian and Michael Josef Sch{\"o}ning}, title = {Self-aligned nanogaps and nanochannels via conventional photolithography and pattern-size reduction technique}, journal = {Electrochimica Acta. 54 (2009), H. 25 Sp. Iss. SI}, pages = {6010 -- 6014}, year = {2010}, }