TY  - JOUR
A1  - Spelthahn, Heiko
A1  - Poghossian, Arshak
A1  - Schöning, Michael Josef
T1  - Self-aligned nanogaps and nanochannels via conventional photolithography and pattern-size reduction technique
T2  - Electrochimica Acta. 54 (2009), H. 25 Sp. Iss. SI
Y1  - 2009
UR  - https://opus.bibliothek.fh-aachen.de/opus4/frontdoor/index/index/docId/3955
SN  - 0013-4686
SP  - 6010
EP  - 6014
ER  -