@article{PoghossianWagnerSchoening2010, author = {Arshak Poghossian and Holger Wagner and Michael Josef Sch{\"o}ning}, title = {Functional testing and characterisation of (bio-)chemical sensors on wafer level}, journal = {Procedia Chemistry. 1 (2009), H. 1}, pages = {835 -- 838}, year = {2010}, }