TY - JOUR A1 - Miyamoto, Koichiro A1 - Seki, Kosuke A1 - Suto, Takeyuki A1 - Werner, Frederik A1 - Wagner, Torsten A1 - Schöning, Michael Josef A1 - Yoshinobu, Tatsuo T1 - Improved spatial resolution of the chemical imaging sensor with a hybrid illumination that suppresses lateral diffusion of photocarriers T2 - Sensor and Actuators B: Chemical N2 - The chemical imaging sensor is a semiconductor-based chemical sensor capable of visualizing pH and ion distributions. The spatial resolution depends on the lateral diffusion of photocarriers generated by illumination of the semiconductor substrate. In this study, two types of optical setups, one based on a bundle of optical fibers and the other based on a binocular tube head, were developed to project a hybrid illumination of a modulated light beam and a ring-shaped constant illumination onto the sensor plate. An improved spatial resolution was realized by the ring-shaped constant illumination, which suppressed lateral diffusion of photocarriers by enhanced recombination due to the increased carrier concentration. Y1 - 2018 UR - https://opus.bibliothek.fh-aachen.de/opus4/frontdoor/index/index/docId/8594 SN - 0925-4005 VL - 273 SP - 1328 EP - 1333 PB - Elsevier CY - Amsterdam ER -