@article{FoersterLueth2007, author = {Arnold F{\"o}rster and H. L{\"u}th}, title = {Surface reactions of trimethylgallium and trimethylarsenic on silicon surfaces}, journal = {Journal of Vacuum Science \& Technology B: Microelectronics and Nanometer Structures. 7 (1989), H. 4}, pages = {720 -- 724}, year = {2007}, }