@article{FoersterLayetLueth2007, author = {Arnold F{\"o}rster and J. M. Layet and H. L{\"u}th}, title = {The effect of inhomogeneous dopant profiles on the electron energy loss spectra of Si(100) /}, journal = {Applied Physics A: Materials Science \& Processing. 47 (1988), H. 1}, pages = {95 -- 97}, year = {2007}, }