@article{SchoeningThustSteffenetal.2006,
  author    = {Michael Josef Sch{\"o}ning and M. Thust and A. Steffen and Mattea M{\"u}ller-Veggian},
  title     = {Kapazitives Sensorarray in Siliziumtechnik f{\"u}r die Prozeß{\"u}berwachung},
  journal   = {ITG-Fachbericht. 148 (1998)},
  pages     = {257 -- 263},
  year      = {2006},
}