TY  - CONF
A1  - Schöning, Michael Josef
A1  - Abouzar, Maryam H.
A1  - Wagner, Torsten
A1  - Näther, Niko
A1  - Rolka, David
A1  - Yoshinobu, Tatsuo
A1  - Kloock, Joachim P.
A1  - Turek, Monika
A1  - Ingebrandt, Sven
A1  - Poghossian, Arshak
T1  - A semiconductor-based field-effect platform for (bio-)chemical and physical sensors: From capacitive EIS sensors and LAPS over ISFETs to nano-scale devices
T2  - MRS Proceedings
Y1  - 2006
UR  - https://opus.bibliothek.fh-aachen.de/opus4/frontdoor/index/index/docId/6850
N1  - Vol. 952 - Symposium F - Integrated Nanosensors
SP  - 1
EP  - 9
ER  -