@article{WissenBogdanskiScheeretal.2017,
  author    = {M. Wissen and N. Bogdanski and H.-C. Scheer and Andreas Bitz and G. Ahrens and G. Gruetzner},
  title     = {Implication of the light polarisation for UV curing of pre-patterned resists},
  journal   = {Microelectronic Engineering},
  volume    = {78-79},
  pages     = {659 -- 664},
  doi       = {10.1016/j.mee.2004.12.099},
  year      = {2017},
}