TY  - JOUR
A1  - Wissen, M.
A1  - Bogdanski, N.
A1  - Scheer, H.-C.
A1  - Bitz, Andreas
A1  - Ahrens, G.
A1  - Gruetzner, G.
T1  - Implication of the light polarisation for UV curing of pre-patterned resists
T2  - Microelectronic Engineering
Y1  - 2005
UR  - https://opus.bibliothek.fh-aachen.de/opus4/frontdoor/index/index/docId/8029
SN  - 0167-9317
VL  - 78-79
SP  - 659
EP  - 664
ER  -