@article{MuellerVeggianHamacherProticetal.2006, author = {Mattea M{\"u}ller-Veggian and A. Hamacher and D. Protic and G. Riepe}, title = {Doping of germanium by ion implantation}, journal = {Annual report 1992 / Forschungszentrum J{\"u}lich Institut f{\"u}r Kernphysik / Baur, G. (Hrsg.). - (Berichte des Forschungszentrums J{\"u}lich ; 2726)}, pages = {274}, year = {2006}, }