@article{SchoeningLueth2006, author = {Michael Josef Sch{\"o}ning and H. L{\"u}th}, title = {Microfabricated semiconductor structures - Advances in (bio-)chemical sensing}, journal = {Coupling of biological and electronic systems : proceedings of the 2nd Caesarium, Bonn, November 1 - 3, 2000 / Karl-Heinz Hoffmann, ed.}, pages = {79 -- 92}, year = {2006}, }