TY - JOUR A1 - Kämper, Klaus-Peter A1 - Picard, A. A1 - Schütze, A. A1 - Wallach, D. T1 - Adopting the Foundry Concept of Semiconductor Fabrication on Educational Schemes and the Virtual Technology Lab (VTL). Picard, A.; Kämper, K.-P.; Schütze, A.; Wallach, D.; Walter, T. T2 - Mst-News (2006) Y1 - 2006 UR - https://opus.bibliothek.fh-aachen.de/opus4/frontdoor/index/index/docId/2876 SN - 0948-3128 SP - 15, 16 EP - u. 35 ER -